The ERS ADM300 is not only the first successful automatic 300mm eWLB debonding tool for the high-performance eWLB package - it also represents the most mature technology on the market. The operation of the ADM300 is virtually identical to the 200mm ADM200 automatic eWLB debonding machine that ERS first brought to market in 2008. The ERS automatic tools offer not only safe separation of the eWLB substrate from its carrier, but also a throughput-enhancing preparation chamber, advanced robotic handling, complete ID control and a network connection to support factory automation. The flash control and shape monitoring functions in the ERS eWLB debonding tools offer inline solutions to challenges that originally required expensive extra process steps or offline tools.