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June 6-8, 2012
SMX Convention Center, Pasay City (Metro Manila)
Hall 1, Booth 147
WaferTherm® Chuck System
Thermal wafer testing for the laboratory environment
ERS® WaferTherm® is a highly accurate stand-alone system suited to the laboratory environment. It provides excellent temperature precision and fast temperature ramping.
- 0.01 °C temperature step precision
- Liquid-cooled peltier chuck system
- Temperature ranges from -65 to +150 °C
- Extremely short temperature settling times
- Compact system with Chiller-integrated controller
Proven Technology for most Accurate Testing Tesults
The ERS® WaferTherm® chuck system is used for high precision thermal wafer test. The proven thermal technology using Peltier elements and liquid cooling has been integrated into most analytical wafer probers on the market.
Ideal Solution for the Laboratory Environment
Its very short temperature settling times and high-resistance insulation has made ERS® WaferTherm® an extremely popular system in wafer laboratories. The system‘s high thermal resolution makes it ideally suited for the liquid crystal failure analysis. Very small temperature increments can be precisely adjusted.
Highest Product Quality Standards
With its years of experience working with Peltier elements, ERS® is able to offer the most reliable operation with this highly accurate stand-alone system. The ERS® incoming quality control and sorting of Peltier elements yields a reliability unseen in other Peltier chucks.
| Coolant | Liquid / Peltier |
| Heater | Peltier |
| Temperature stability | ± 0.05 °C |
| Temperature display resolution | 0.01 °C |
| Temperature uniformity | ± 0.5°C or ± 0.5% of actual temperature |
| Temperature control | Low Noise PID with optional dynamic control |
| Insulation resistance | > 0.5 TOhm |
| Chuck surface flatness | ± 8 µm at +25 °C |
| System power supply | Single phase |
| Communication interface | RS232 and Ethernet |
The temperature range and cooling speed depend on the type of wafer prober with which the system is used. Detailed specifications for the respective prober are available on request.
Please order our AirCool® product brochure to get more information. For futher information and application notes, please log in to our product support section.
Product slideshow
AirCool® consists of various components, depending on the modules and the wafer prober. wide temperature range, compact chiller, low power.
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